I-Magetron Sputtering Machine
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Vacuum ifilimu elincanyana le-magnetron sputtering coatinging umshini
I-vacuum magnetron sputtering technique iwukusetshenziswa kwendawo yesifazane, i-bipolar electrode enendawo kazibuthe ye-electron endaweni ye-cathode surface drift, ngokubeka indawo kagesi eqondiwe iqondane nenkundla kazibuthe, i-electron yandisa unhlangothi, yandisa izinga le-ionization. kwegesi, kuyilapho izinhlayiya ezinamandla aphezulu igesi futhi zilahlekelwa amandla ngemva kokungqubuzana kanye nezinga lokushisa eliphansi le-substrate, ukumbozwa okuphelele kwento engamelana nezinga lokushisa.
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Isistimu ye-vacuum deposition magnetron sputtering
I-vacuum deposition magnetron sputtering system iwuhlobo lwemishini yokuvala engasetshenziselwa ukufaka izendlalelo zokumboza ifilimu elincanyana ezintweni ezingavuthiwe ezihlukene ezinezinsimbi noma ezisebenzayo.
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I-Magnetron sputtering coating machine yezingcezu zepulasitiki ezilahlwayo
I-Magnetron sputtering ubuchwepheshe bokufakwa kwefilimu emincane esetshenziswa kabanzi njengamanje.Ngokuthuthuka okuqhubekayo kobuchwepheshe be-sputtering kanye nokuhlolwa kwamafilimu amasha asebenzayo, ukusetshenziswa kwe-magnetron sputtering kuye kwanwetshwa emikhakheni eminingi yokukhiqiza nokucwaninga kwesayensi.Njengobuchwepheshe bokuhlanganisa okungewona okushisa emkhakheni we-microelectronics, isetshenziswa kakhulu ekubekeni umhwamuko wamakhemikhali (CVD) noma i-metal organic chemical vapor deposition (MOCVD) ukufaka amafilimu amancane ezinto okunzima ukuzikhulisa nezingafaneleki, futhi ezingatholwa. amafilimu amancane kakhulu afanayo ezindaweni ezinkulu.
