I-Aluminium Mirror Inline Magnetron Sputtering Line

Incazelo emfushane:

I-Aluminium Mirror Inline Magnetron Sputtering Line iklanyelwe ukuphuma okuphezulu kwenhloso yokukhiqiza isibuko sengilazi.Ukuze sigqokise ingilazi enkulu futhi sinakekele iphaneli yengilazi entekenteke, ikakhulukazi amashidi osayizi abakhulu, sivamise ukwenza uhlobo oluvundlile lomugqa wokuphalaza.Iwumugqa oqhubekayo wokuhlanganisa uzibuthe, onegumbi lokumpompa elimahhadla ngaphambili nangemuva, nangemuva kwegumbi lenguquko, ngaphambi nangemuva kwegumbi lokumpompa elihle, igumbi le-buffer, igumbi lokufaka imibala.

I-Target d esign: i-cylindrical magnetron sputtering cathodes noma/kanye nama-planar cathodes.

Umthombo wamandla: ukunikezwa kwamandla ngamandla aphezulu e-DC noma i-MF magnetron sputtering

Isistimu yokushayela: i-roller drive, i-frequency adjustable, uhlelo lokuvula umnyango wegumbi lokungeniswa.

Isistimu ye-vacuum: iphampu yokusabalalisa (noma i-turbo molecular pump) + impompo yezimpande + iphampu yomshini

Thumela i-imeyili kithi

Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Izici eziyinhloko

I-Aluminium Mirror Inline Magnetron Sputtering Line ivamise ukuza namakamelo amaningi e-vacuum ukuze kuqedelwe ukumbozwa kwe-vacuum kumashidi engilazi.
Izici eziyinhloko:
1.Max.glass usayizi enamathela:2440x3660mm noma ngezifiso
2. Amakamelo e-Multi-vacuum kanye ne-multi-sputtering chamber design ayatholakala
3. Ulayini wokulawula kazibuthe ovundlile unesakhiwo esisodwa kanye nesiphetho esikabili;ingilazi yokuhlanza kabili, ukumboza, ukutholwa, ukudweba, ukumisa, ukupholisa kungaqedwa konke ngesikhathi esisodwa
4. Ulayini wokugoqa usebenzisa i-PLC ekulawuleni inqubo yonke futhi ufakwe isikrini sombala ukukhombisa idatha yenqubo yokumboza.

Isendlalelo sezingubo: I-Titanium, i-Chrome, insimbi engagqwali, i-Aluminium, isiliva, ithusi, njll.

Inhlanganisela: TiN, TiO2, njll.
Ugqinsi lwesendlalelo: 5-100nm
Ukudlulisa: 8-40% ku-380-780 nm wavelengths
Izinga lokushisa lokubeka: izinga lokushisa legumbi

Ukucindezela okukhulu ngemva kokupompa phansi kwamahora angu-8:
Igumbi lokungena lokukhiya kanye negumbi lokukhiya i-vacuum: 5×10-1 Pa noma ngezansi
Buffer Chamber 1 : 3×10-3 Pa noma ngezansi
I-Sputtering Chamber: 2×10-3 Pa noma ngezansi
Buffer Chamber 2 : 3×10-3 Pa noma ngezansi
Phuma egunjini lokukhiya kanye negumbi lokukhiya: 5×10-1 Pa noma ngezansi